INFICON Worldwide
Home   |   Product Index   |   Support   |   Library   |   Calendar   |   News

  Semiconductor & Vacuum Coating Process

Customer Support | Technical Info | Calendar | Product News  


> Electron Beam Gun Crucible Indexer
> FabGuard Suite
> In Situ Particle Detectors
> Integrated Process Monitoring
> Leak Detectors
> Quartz Monitor Crystals
>RF Sensing Technology with FabGuard
> Residual Gas Analyzers
> Thin Film Deposition Controllers/QCM
> Vacuum Components
> Vacuum Gauges
> Vacuum Valves and Gas Dosing Systems
RF Sensing Technology with FabGuard

INFICON market leading RF Sensing Technology combines the latest technical advancements in RF sensor design with quality manufacturing procedures to create a unique range of RF products to meet today's semiconductor tool process measurement needs. From simple applications like arc detection and chamber clean endpoint control to full-frequency discriminate RF analysis for predictive modeling, INFICON offers the best product portfolio to meet your RF sensing needs.

Sion RF Detector for Endpoint Control

Sion RF Detector for Plasma Arc Detection

RFS100 RF Sensor - Modeling capable, frequency discriminate