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Products:

> FabGuard Software Suite
> Integrated Process Monitoring
> Leak Detectors
> RF Sensing Technology with FabGuard
 
•  RFS100 RF Sensor
•  Sion RF Detector for Endpoint Control
•  Sion RF Detector for Plasma Arc Detection
   
> Residual Gas Analyzers
> Vacuum Components
> Vacuum Gauges
> Vacuum Valves and Gas Dosing Systems



RF Sensing Technology
帶有 FabGuard 傳感器集成和分析系統的射頻傳感器技術

結合 FabGuard 的高靈敏度射頻測量提供：

  • 精確、可重複的反應室清洗和過程終點

  • 故障根本原因分析（如等離子弧檢測）

  • PVD、CVD 和蝕刻應用中用于沉積室匹配的過程“指紋”識別

 

Featured Product

Sion RF Detector for Plasma Arc Detection - Ultra-fast, high power analysis of micro-arcing




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