Inficon





Worldwide


Semiconductor

Products:


> FabGuard Software Suite
> Integrated Process Monitoring
> Leak Detectors
> RF Sensing Technology with FabGuard
 
•  RFS100 RF Sensor
•  Sion RF Detector for Endpoint Control
•  Sion RF Detector for Plasma Arc Detection
   
> Residual Gas Analyzers
> Vacuum Components
> Vacuum Gauges
> Vacuum Valves and Gas Dosing Systems



RF Sensing Technology
INFICON market leading RF Sensing Technology combines the latest technical advancements in RF sensor design with quality manufacturing procedures to create a unique range of RF products to meet today's semiconductor tool process measurement needs. From simple applications like arc detection and chamber clean endpoint control to full-frequency discriminate RF analysis for predictive modeling, INFICON offers the best product portfolio to meet your RF sensing needs.

Sion RF Detector for Endpoint Control

Sion RF Detector for Plasma Arc Detection

RFS100 RF Sensor - Modeling capable, frequency discriminate

Featured Product

Sion RF Detector for Plasma Arc Detection - Ultra-fast, high power analysis of micro-arcing




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