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Electron Beam Gun Crucible Indexer
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Vacuum Valves and Gas Dosing Systems
带有 FabGuard 传感器集成和分析系统的射频传感器技术
结合 FabGuard 的高灵敏度射频测量提供：
精确、可重复的反应室清洗和过程终点
故障根本原因分析（如等离子弧检测）
PVD、CVD 和蚀刻应用中用于沉积室匹配的过程“指纹”识别
